Wideband characterization of body-accessed PD SOI MOSFETs with multiport measurements

D. Lederer, O. Rozeau, J. Raskin
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引用次数: 6

Abstract

In this work we present an original method based on 3-port RF measurements to accurately extract the body resistance (R/sub be/) in body-accessed PD SOI MOSFETs. This method can be used to assess the validity of compact models such as BSIMSOI. The RF body access also enabled a precise characterization of intrinsic and extrinsic body capacitances. A complete 3-port model was then derived and further validated on DT MOSFET measurements by connecting the body to the gate terminal.
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体接入PD SOI mosfet多端口测量的宽带特性
在这项工作中,我们提出了一种基于3端口射频测量的原始方法,以准确提取体接入PD SOI mosfet中的体电阻(R/sub /)。该方法可用于评价BSIMSOI等紧凑模型的有效性。射频体接入也能够精确表征内在和外在体电容。然后推导出一个完整的3端口模型,并通过将主体连接到栅极终端在DT MOSFET测量上进一步验证。
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