E. Yamamoto, S. Hashimoto, M. Ito, I. Komazaki, K. Yanagisawa
{"title":"Optical tactile sensor using surface-emitting laser","authors":"E. Yamamoto, S. Hashimoto, M. Ito, I. Komazaki, K. Yanagisawa","doi":"10.1109/MEMSYS.1995.472575","DOIUrl":null,"url":null,"abstract":"There exists a growing demand for an ultra small tactile sensor used in future industrial and medical systems, such as a miniature robot for inspection and repair in an extremely small space and an endoscopelcatheter used in the minimum invasive, laparoscopic surgical system for diagnosis and treatment. An optical sensor has a high sensitivity and a large Electromagnetic Interference (EMI) tolerance, which is necessary and important in a practical use combined with any other electrical apparatus. However, a miniaturization and a product cost reduction of an optical sensor is very difficult because a conventional high sensitive optical sensor consists of a laser and many precisely assembled optical components such as a lens for a beam shaping, an optical isolator to prevent a lasing wavelength instability induced by an optical feedback, an optical beam splitter to construct an interferometric optical path. Recently, some optical pressure sensor using an optical fiber is developed[l],[2]. These sensor consists of a small sensing element and a rather large optical interferometer which is spatially separated from the sensing element. Although sensing tips of these fiber-optic sensors are rather small, they have a serious drawback that the change of fiber bending shape strongly affects on a sensor output to induce sensing error. A surface-emitting laser (SEL) has two advantages compared to a conventional edgeemitting laser for the sensing use. One is a lasing wavelength stability against an optical feedback. The other is a design flexibility for a divergence angle of radiation beam. Consequently, an optical sensor with SEL can realize a miniaturized sensor which does not needs any optical components such as lenses and an optical isolator. This paper describes a feasibility study for an optical tactile sensor using SEL as a light source. 2. Principle of Operation","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"108 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472575","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
There exists a growing demand for an ultra small tactile sensor used in future industrial and medical systems, such as a miniature robot for inspection and repair in an extremely small space and an endoscopelcatheter used in the minimum invasive, laparoscopic surgical system for diagnosis and treatment. An optical sensor has a high sensitivity and a large Electromagnetic Interference (EMI) tolerance, which is necessary and important in a practical use combined with any other electrical apparatus. However, a miniaturization and a product cost reduction of an optical sensor is very difficult because a conventional high sensitive optical sensor consists of a laser and many precisely assembled optical components such as a lens for a beam shaping, an optical isolator to prevent a lasing wavelength instability induced by an optical feedback, an optical beam splitter to construct an interferometric optical path. Recently, some optical pressure sensor using an optical fiber is developed[l],[2]. These sensor consists of a small sensing element and a rather large optical interferometer which is spatially separated from the sensing element. Although sensing tips of these fiber-optic sensors are rather small, they have a serious drawback that the change of fiber bending shape strongly affects on a sensor output to induce sensing error. A surface-emitting laser (SEL) has two advantages compared to a conventional edgeemitting laser for the sensing use. One is a lasing wavelength stability against an optical feedback. The other is a design flexibility for a divergence angle of radiation beam. Consequently, an optical sensor with SEL can realize a miniaturized sensor which does not needs any optical components such as lenses and an optical isolator. This paper describes a feasibility study for an optical tactile sensor using SEL as a light source. 2. Principle of Operation
对未来工业和医疗系统中使用的超小型触觉传感器的需求日益增长,例如在极小空间内进行检测和维修的微型机器人,以及用于诊断和治疗的微创腹腔镜手术系统中的内窥镜导管。光学传感器具有高灵敏度和较大的电磁干扰(EMI)容限,这在与任何其他电气设备的实际结合使用中都是必要和重要的。然而,要实现光学传感器的微型化并降低产品成本却非常困难,因为传统的高灵敏度光学传感器由激光器和许多精密装配的光学元件组成,如用于光束整形的透镜、用于防止光反馈引起的激光波长不稳定的光隔离器、用于构建干涉光路的光分束器等。最近,一些使用光纤的光学压力传感器被开发出来[l], [2]。这些传感器由一个小的传感元件和一个相当大的光学干涉仪组成,光学干涉仪与传感元件在空间上是分离的。虽然这些光纤传感器的传感头很小,但它们有一个严重的缺点,即光纤弯曲形状的变化会对传感器的输出产生强烈影响,从而导致传感误差。与用于传感的传统边缘发射激光器相比,表面发射激光器(SEL)有两个优点。其一是激光波长稳定,不会受到光反馈的影响。另一个优势是辐射光束发散角的设计灵活性。因此,带有 SEL 的光学传感器可以实现传感器的小型化,不需要透镜和光隔离器等任何光学元件。本文介绍了使用 SEL 作为光源的光学触觉传感器的可行性研究。2.工作原理