Electrical Inspection of PROM Memory Links

A. Marques
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Abstract

Field programmable ROMs provide the electronics industry with a more versatile memory function by postponing final processing until after the seal operation. This report will focus on (1) a failure mechanism, unreported until now, which concerns the self-programming of an unprogrammed nichrome link during operation of the PROM under normal "read" conditions, and (2) an electrical screen for culling out links with a high probability for self-programming. The occurrence of these failures after many days of burn-in will be discussed along with the link programming set-up, failure analysis data, and documented history of high reliability screening procedures. It is important to note that these PROMs were programmed to the vendor's specifications, except that a single pulse fusing criterion was used. Additionally, an elaborate verification scheme followed each fusing attempt as a check for errors. Based on the results of the failure analysis study, the failures which are considered to be escapes from the die visual inspection screen will be shown to be due to a wafer process-related fault. A new electrical test procedure will be proposed which can be used to augment or partially supplant the visual screen now in practice. A general test scheme will be presented so that the prerequisite conditions of applicability to other manufacturers' PROMs can be defined. The general scheme will be then applied to the specific circuit implementation used by the manufacturer of the aforementioned failures.
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PROM存储器链路的电气检查
现场可编程rom通过将最终处理推迟到密封操作之后,为电子工业提供了更通用的存储功能。本报告将重点讨论(1)迄今为止尚未报道的故障机制,它涉及在正常“读取”条件下PROM操作期间未编程的镍铬合金链路的自编程,以及(2)用于剔除具有高自编程概率的链路的电子屏幕。在许多天的老化后,这些故障的发生将与链接编程设置、故障分析数据和高可靠性筛选程序的记录历史一起讨论。重要的是要注意,这些prom是按照供应商的规范编程的,除了使用了单脉冲熔合标准。此外,每个融合尝试之后都有一个详细的验证方案,以检查错误。根据失效分析研究的结果,被认为是脱离模具视觉检查屏幕的失效将显示为由于晶圆工艺相关的故障。本文将提出一种新的电气测试程序,可用于补充或部分取代目前在实践中使用的视觉屏幕。本文将提出一个通用的测试方案,以便确定适用于其他制造商的prom的先决条件。然后将一般方案应用于上述故障的制造商使用的特定电路实现。
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