N. Chong, I-Ru Chen, Da Cheng, Amitava Majumdar, Ping-Chin Yeh, Jonathan Chang
{"title":"DFT-enabled within-die AC uniformity and performance monitor structure for advanced process","authors":"N. Chong, I-Ru Chen, Da Cheng, Amitava Majumdar, Ping-Chin Yeh, Jonathan Chang","doi":"10.1109/ICMTS.2018.8383778","DOIUrl":null,"url":null,"abstract":"An on-chip ring oscillator based process monitoring vehicle embedded within host automatic place and route digital blocks and accessed through design for testability (DFT) circuit is introduced and characterized. Within-wafer AC uniformity (ACU), performance and power consumption for the ring oscillator are analyzed in a 7 nanometer technology testchip. The design and analysis techniques described are suitable to monitor process variation, real-time power fluctuation and performance proxy of host digital blocks in products.","PeriodicalId":271839,"journal":{"name":"2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2018.8383778","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An on-chip ring oscillator based process monitoring vehicle embedded within host automatic place and route digital blocks and accessed through design for testability (DFT) circuit is introduced and characterized. Within-wafer AC uniformity (ACU), performance and power consumption for the ring oscillator are analyzed in a 7 nanometer technology testchip. The design and analysis techniques described are suitable to monitor process variation, real-time power fluctuation and performance proxy of host digital blocks in products.
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