Characterization of unintentionally-ordered superlattice resonant-tunneling diodes

A. Seabaugh, Y. Kao, H. Liu, J. Luscombe, H. Tsai, M. Reed, B. Gnade, W. Frensley
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引用次数: 1

Abstract

In the molecular-beam-epitaxy growth of ternary and quaternary InGaAs and In(GaAl)As alloys on InP it is observed that the layer composition is ordered in the direction of growth. This ordering is caused by the nonuniform distribution of beam fluxes at the rotating substrate with an ordering period determined by the combined effects of growth rate and substrate rotation rate. The effect of the ordering is to produce a strained-layer superlattice whose properties can be inferred from the current-voltage characteristics of resonant-tunneling diodes. The physical and electrical characteristics of these rotation-induced superlattices are described utilizing several one-dimensional theoretical approaches to calculate the miniband structure and interpret the experimental data.<>
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非故意有序超晶格共振隧道二极管的表征
在三元和四元InGaAs和In(GaAl)As合金在InP上的分子束外延生长中,观察到层的组成在生长方向上是有序的。这种有序是由于光束通量在旋转衬底处的不均匀分布造成的,有序周期由生长速率和衬底旋转速率的综合作用决定。排序的效果是产生应变层超晶格,其性质可以从谐振隧道二极管的电流-电压特性推断出来。利用几种一维理论方法来计算微带结构和解释实验数据,描述了这些旋转诱导超晶格的物理和电特性
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Expertise, optimisation and control of InP and related technologies by scanning photoluminescence measurements Dislocation density after S-diffusion into p-type InP substrates Surface recombination and high efficiency in InP solar cells Molecular beam epitaxial growth techniques for graded-composition InGaAlAs/InP alloys Submicron double heterojunction strained InAlAs/InGaAs HEMTs: an experimental study of DC and microwave properties
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