M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda
{"title":"Simulation-based design of a MEMS X-ray optic for X-ray astronomy","authors":"M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda","doi":"10.1109/OMEMS.2008.4607859","DOIUrl":null,"url":null,"abstract":"An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607859","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.