{"title":"Understanding of spin-on-glass (SOG) properties from their molecular structure","authors":"C. Chiang, D. Fraser","doi":"10.1109/VMIC.1989.78000","DOIUrl":null,"url":null,"abstract":"A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed.<<ETX>>","PeriodicalId":302853,"journal":{"name":"Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference","volume":"126 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VMIC.1989.78000","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 14
Abstract
A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed.<>
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