Ayana Mizutani, S. Takamatsu, T. Itoh, Zymelka Maria, Takeshi Kobayashi
{"title":"Glove-shaped wearable device using flexible MEMS sensor","authors":"Ayana Mizutani, S. Takamatsu, T. Itoh, Zymelka Maria, Takeshi Kobayashi","doi":"10.23919/ICEP55381.2022.9795402","DOIUrl":null,"url":null,"abstract":"An ultrathin Si MEMS piezoresistive strain sensor was used to fabricate a glove-shaped wearable device that can be used in VR and surgical assistance. In this paper, we proposed a mounting structure that reduces strain concentration at the connection between the sensor and the wiring. The proposed mounting structure was able to withstand strains of up to 66.9%. With this structure, we succeeded in measuring the bending motion of fingers with the constructed wearable device.","PeriodicalId":413776,"journal":{"name":"2022 International Conference on Electronics Packaging (ICEP)","volume":"4 6","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 International Conference on Electronics Packaging (ICEP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/ICEP55381.2022.9795402","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
An ultrathin Si MEMS piezoresistive strain sensor was used to fabricate a glove-shaped wearable device that can be used in VR and surgical assistance. In this paper, we proposed a mounting structure that reduces strain concentration at the connection between the sensor and the wiring. The proposed mounting structure was able to withstand strains of up to 66.9%. With this structure, we succeeded in measuring the bending motion of fingers with the constructed wearable device.