V. Chan, M. Bergendahl, J. Strane, B. Austin, C. Boye, S. Mattam, S. Choi, A. Gaul, K. Cheng, A. Greene, D. Lea, T. Levin, G. Karve, S. Teehan, D. Guo
{"title":"Failure Isolation in Ring Oscillator Circuit and Defect Detection in CMOS Technology Research","authors":"V. Chan, M. Bergendahl, J. Strane, B. Austin, C. Boye, S. Mattam, S. Choi, A. Gaul, K. Cheng, A. Greene, D. Lea, T. Levin, G. Karve, S. Teehan, D. Guo","doi":"10.1109/ASMC.2019.8791793","DOIUrl":null,"url":null,"abstract":"Ring oscillators (ROs) are used for yield learning during the research phase of a CMOS technology generation. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.","PeriodicalId":287541,"journal":{"name":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2019.8791793","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Ring oscillators (ROs) are used for yield learning during the research phase of a CMOS technology generation. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.
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