B. Landau, B. Bastani, D. Haueisen, R. Lahri, S. P. Joshi, J. Small
{"title":"Poly emitter bipolar transistor optimization for an advanced BiCMOS technology","authors":"B. Landau, B. Bastani, D. Haueisen, R. Lahri, S. P. Joshi, J. Small","doi":"10.1109/BIPOL.1988.51060","DOIUrl":null,"url":null,"abstract":"Two approaches involving phosphorus- and arsenic-doped poly emitters for bipolar device optimization in a 1 mu m BiCMOS process are reported. An evaluation includes a comparison of process and device parameters for the two emitter types in the context of a junction-isolated process. The impact of device optimization as measured by ECL and BiCMOS ring oscillators and a BiCMOS 256 K SRAM is discussed. Finally, the reliability of phosphorus and arsenic poly emitters, in terms of beta degradation due to reverse biasing of the emitter-base junction, is presented.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"177 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BIPOL.1988.51060","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Two approaches involving phosphorus- and arsenic-doped poly emitters for bipolar device optimization in a 1 mu m BiCMOS process are reported. An evaluation includes a comparison of process and device parameters for the two emitter types in the context of a junction-isolated process. The impact of device optimization as measured by ECL and BiCMOS ring oscillators and a BiCMOS 256 K SRAM is discussed. Finally, the reliability of phosphorus and arsenic poly emitters, in terms of beta degradation due to reverse biasing of the emitter-base junction, is presented.<>
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