A. Firiti, D. Lewis, F. Beaudoin, P. Perdu, G. Haller, Y. Danto
{"title":"Implementing Thermal Laser and Photoelectric Laser Stimulation in a failure analysis laboratory","authors":"A. Firiti, D. Lewis, F. Beaudoin, P. Perdu, G. Haller, Y. Danto","doi":"10.1109/IPFA.2003.1222768","DOIUrl":null,"url":null,"abstract":"First Photoelectric Laser Stimulation results (OBIC or LIVA) obtained with an upgraded version of a PHEMOS 1000 from Hamamatsu are presented. This technique is applied in a case study concerning ESD defect localization and is compared to the Thermal Laser Stimulation one.","PeriodicalId":266326,"journal":{"name":"Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2003-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2003.1222768","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
First Photoelectric Laser Stimulation results (OBIC or LIVA) obtained with an upgraded version of a PHEMOS 1000 from Hamamatsu are presented. This technique is applied in a case study concerning ESD defect localization and is compared to the Thermal Laser Stimulation one.