{"title":"One and two-dimensional MMI device with strong confinement structure on SOI","authors":"Yanzhe Tang, Yiling Sun, Wenhui Wang, Yaming Wu, Jianyi Yang, Xiaoqing Jiang","doi":"10.1109/GROUP4.2004.1416712","DOIUrl":null,"url":null,"abstract":"One and two-dimensional MMI couplers with strong confinement on SOI were fabricated. Analysis shows that it has lower imbalance, wider bandwidth and better fabrication tolerance. A special process was proposed to eliminate the alignment error.","PeriodicalId":299690,"journal":{"name":"First IEEE International Conference on Group IV Photonics, 2004.","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"First IEEE International Conference on Group IV Photonics, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2004.1416712","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
One and two-dimensional MMI couplers with strong confinement on SOI were fabricated. Analysis shows that it has lower imbalance, wider bandwidth and better fabrication tolerance. A special process was proposed to eliminate the alignment error.
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