H.I. Ocakli, A. Ozturk, N. Ozber, H. Kavakli, E. Alaca, H. Urey
{"title":"Resonant cantilever bio sensor with integrated grating readout","authors":"H.I. Ocakli, A. Ozturk, N. Ozber, H. Kavakli, E. Alaca, H. Urey","doi":"10.1109/OMEMS.2008.4607821","DOIUrl":null,"url":null,"abstract":"Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"92 8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607821","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
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