S. Sulaiman, N. Lazim, R. A. Bakar, Z. Awang, A. Dollah
{"title":"Effect of grounding arrangement on PZT thin film capacitor","authors":"S. Sulaiman, N. Lazim, R. A. Bakar, Z. Awang, A. Dollah","doi":"10.1109/APACE.2007.4603975","DOIUrl":null,"url":null,"abstract":"This paper reports on a new investigation carried out on the grounding arrangement of monolithic microwave integrated circuit (MMIC) thin film capacitors to improve their high frequency behavior. Via holes have been etched on the PZT to create the ground contact. The measurement shows an improvement in the capacitor response compared to direct contact to the exposed Pt area at the film edge.","PeriodicalId":356424,"journal":{"name":"2007 Asia-Pacific Conference on Applied Electromagnetics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Asia-Pacific Conference on Applied Electromagnetics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APACE.2007.4603975","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
This paper reports on a new investigation carried out on the grounding arrangement of monolithic microwave integrated circuit (MMIC) thin film capacitors to improve their high frequency behavior. Via holes have been etched on the PZT to create the ground contact. The measurement shows an improvement in the capacitor response compared to direct contact to the exposed Pt area at the film edge.
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