{"title":"Analysis of Organic Surface Contaminants by Plasma Chromatography - Mass Spectroscopy and Raman Microprobe Techniques","authors":"T. Carr","doi":"10.1109/IRPS.1980.362937","DOIUrl":null,"url":null,"abstract":"A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.","PeriodicalId":270567,"journal":{"name":"18th International Reliability Physics Symposium","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1980-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"18th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1980.362937","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.
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