Direct observation of localized high current effects in gallium arsenide field effect transistors

M. P. Dugan
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Abstract

High power GaAs integrated circuits operated at elevated temperatures display failure mechanisms which result from the high current densities through the FETs. Evidence of material growths or material accumulations on the drain contacts of high current FETs has been observed after the GaAs substrate material has been removed by chemical etching. These observations support the conclusion that these growths are responsible for end-of-life failures in the high current FETs.
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砷化镓场效应晶体管局部大电流效应的直接观察
在高温下工作的大功率GaAs集成电路显示出由通过fet的高电流密度导致的失效机制。在化学蚀刻去除GaAs衬底材料后,观察到在高电流场效应管的漏极触点上有物质生长或物质积累的证据。这些观察结果支持这样的结论,即这些生长是导致高电流场效应管寿命终止失效的原因。
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