Optics and actuators for miniaturized spectrometers

Abstract

We propose a variety of miniaturized microelectromechanical (MEMS) spectrometers. Emphasis is put on the development of a Fourier transform spectrometer based on a Michelson interferometer. A new design of the existing chip has been realized in order to integrate an input fiber, a collimating system as well as a beam splitting plate. This new design allows to carry out spectroscopy with white light. In fact, since white light has a smaller length of coherence, the phase difference zero is extremely important to be well set, i.e. the optical path in each branch of the interferometer has to be equal. Finally, we present two other designs of spectrometers: a lamellar grating spectrometer and a Hadamard transform spectrometer.