{"title":"Radiation heat transfer dominated microbolometers","authors":"A. Gawarikar, R. Shea, A. Mehdaoui, J. Talghader","doi":"10.1109/OMEMS.2008.4607887","DOIUrl":null,"url":null,"abstract":"Radiation heat transfer limited thermal conductance represents the ultimate lower limit of the thermal isolation achievable in a microbolometer. A microbolometer structure with radiation limited thermal conductance has been fabricated and its operation demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607887","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Radiation heat transfer limited thermal conductance represents the ultimate lower limit of the thermal isolation achievable in a microbolometer. A microbolometer structure with radiation limited thermal conductance has been fabricated and its operation demonstrated.
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