Jin-Ho Lee, Young-Chul Ko, Do-Hyun Kong, Jong-Min Kim, K. Lee, D. Jeon
{"title":"Fabrication of silicon optical scanner for laser display","authors":"Jin-Ho Lee, Young-Chul Ko, Do-Hyun Kong, Jong-Min Kim, K. Lee, D. Jeon","doi":"10.1109/OMEMS.2000.879604","DOIUrl":null,"url":null,"abstract":"A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"409 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"34","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879604","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 34
Abstract
A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
