{"title":"Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner","authors":"I. Jung, S.B. Mallick, O. Solgaard","doi":"10.1109/OMEMS.2008.4607836","DOIUrl":null,"url":null,"abstract":"In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"83 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607836","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.
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