Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner

I. Jung, S.B. Mallick, O. Solgaard
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引用次数: 1

Abstract

In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.
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大面积高反射率宽带单片硅光子晶体镜MEMS扫描仪
本文介绍了一种在1550nm波段具有宽带高反射率(>90%)的单片硅二维光子晶体(PC)反射镜的MEMS扫描仪。该光子晶体作为MEMS扫描仪制造过程的一个组成部分产生,从而产生具有镜面的单片结构,在500 μ m × 500 μ m面积上具有~ λ /100的平面度。反射光谱表明,PC镜在1520 ~ 1620 nm范围内具有较高的反射率(> ~ 90%)。扫描器的扫描范围为22度,输入方波为67 V,共振频率为2.13 kHz。
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