New capacitor parametric test methodology for process issues control

Abstract

This paper describes a new measurement methodology based on LCR-meter tan(delta) measurement versus frequency. Directly integrated during parametric test, it gives information on capacitors key parameters like dielectric relaxation, potential dielectric contamination, extrinsic conduction, series resistance and process issue. The methodology is validated, thanks to the Kramers-Kronig relations, traditional I(V) measurements and series resistance model. Finally a practical example of a 3D MIM capacitor is studied.