{"title":"The Advanced Semiconductor Technology Center: a technology engine for the future","authors":"J. Kristoff","doi":"10.1109/ASMC.1990.111232","DOIUrl":null,"url":null,"abstract":"Summary form only given. IBM's Advanced Semiconductor Technology Center (ASTC), which provides a model of a development fabricator for future generations of semiconductor technology, is discussed. The ASTC assures development with a manufacturing environment. Facilities, equipment, and materials have been designed to meet future technology manufacturability. Some technology trends are given.<<ETX>>","PeriodicalId":158760,"journal":{"name":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","volume":"57 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.1990.111232","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Summary form only given. IBM's Advanced Semiconductor Technology Center (ASTC), which provides a model of a development fabricator for future generations of semiconductor technology, is discussed. The ASTC assures development with a manufacturing environment. Facilities, equipment, and materials have been designed to meet future technology manufacturability. Some technology trends are given.<>
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