Blue electroluminescence from MOS capacitors with Si-implanted SiO/sub 2/

T. Matsuda, M. Kawabe, K. Nishihara, H. Iwata, S. Iwatsubo, T. Ohzone
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引用次数: 5

Abstract

In this work, we demonstrate blue electroluminescence (EL) from Au/SiO/sub 2//p-Si MOS capacitor with Si implanted SiO/sub 2/. The transparent Au gate not only improves measurable wavelength range but also suppresses interference effects among MOS layers. The EL spectra have been successfully analysed by Gaussian distributions, and the EL mechanism is discussed. Gate current (J/sub G/) versus gate voltage (V/sub G/) characteristics under accumulation conditions was analysed. Blue EL spectra was observed and the measured data are successfully fitted by the Gaussian curves for EL mechanism analysis.
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硅注入SiO/sub / 2/ MOS电容器的蓝色电致发光
在这项工作中,我们展示了用Si注入SiO/sub / 2/ Au/SiO/ p-Si MOS电容器的蓝色电致发光(EL)。透明金栅不仅提高了可测波长范围,而且抑制了MOS层间的干扰效应。用高斯分布法成功地分析了电致发光光谱,并讨论了电致发光机理。分析了积累条件下栅极电流(J/sub G/)与栅极电压(V/sub G/)的特性。观察到蓝色电致发光光谱,并成功地用高斯曲线拟合了电致发光机理。
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