{"title":"Finite element modelling of influence of bonding material distribution in precision piezoresistive MEMS pressure-sensors","authors":"Åsmund Sandvand, E. Halvorsen, K. Aasmundtveit","doi":"10.1109/ESTC.2014.6962829","DOIUrl":null,"url":null,"abstract":"A MEMS pressure-sensor, including its vacuum reference cavity, is modelled with focus on resulting stress from a glass frit bonding process. Based on CT-scans of bonded samples, a parametric model for FEM analysis of observed variations in bonding material distribution has been developed. Simulations show a high influence of amount and distribution of excess glass frit material on the zero-point as well as a good correlation with manufacturing data. Simulated variations of glass frit material distribution shows a variation of the zero-point of -1.5 % full scale (FS) to -7.2 %FS, depending on configuration.","PeriodicalId":299981,"journal":{"name":"Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)","volume":"47 38","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-11-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESTC.2014.6962829","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A MEMS pressure-sensor, including its vacuum reference cavity, is modelled with focus on resulting stress from a glass frit bonding process. Based on CT-scans of bonded samples, a parametric model for FEM analysis of observed variations in bonding material distribution has been developed. Simulations show a high influence of amount and distribution of excess glass frit material on the zero-point as well as a good correlation with manufacturing data. Simulated variations of glass frit material distribution shows a variation of the zero-point of -1.5 % full scale (FS) to -7.2 %FS, depending on configuration.
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