Far-field pattern control and light-extraction enhancement of deep-ultraviolet light-emitting diodes with large-area Fresnel zone plate nano-structures

Lingjie Wei, Manabu Taniguchi, Guo-Dong Hao, Shin-ichiro Inoue
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Abstract

Abstract Conventional methods using high-purity quartz lenses to control deep-ultraviolet light-emitting diode (DUV-LED) far-field patterns have limitations, including small effective apertures and high cost. We apply phase-type Fresnel zone plates to control the beam angle and enhance light extraction efficiency (LEE) for DUV-LEDs on sapphire and AlN substrates. We demonstrate highly-collimated optics-free DUV-LED emissions with full width at half maximum far-field divergence angles of 40° and 10° on sapphire and AlN substrates at a peak emission wavelength of 279 nm and 273 nm, respectively. LEE enhancements of 1.4 and 1.5 times for DUV-LEDs on sapphire and AlN substrates, respectively, are also achieved.
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大面积菲涅耳带板纳米结构深紫外发光二极管远场模式控制和光提取增强
传统的利用高纯度石英透镜控制深紫外发光二极管(DUV-LED)远场图形的方法存在有效孔径小、成本高等局限性。我们采用相位型菲涅耳带片来控制光束角度,提高蓝宝石和AlN衬底上duv - led的光提取效率。我们在蓝宝石和AlN衬底上展示了高度准直的无光学DUV-LED发射,其最大远场发散角的一半为40°和10°,峰值发射波长分别为279 nm和273 nm。在蓝宝石和AlN衬底上的duv - led的LEE分别提高了1.4倍和1.5倍。
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