{"title":"Characteristics of tin droplet target system for EUV source research","authors":"Qin Sun, Xinbing Wang, D. Zuo","doi":"10.1088/1361-6501/ad1810","DOIUrl":null,"url":null,"abstract":"\n Droplet-based laser-produced plasma source shows enormous significance in extreme ultraviolet lithography, which places high demands on the stability of tin droplets. This paper presents a tin droplet target system including the tin droplet generator (DG), droplet diagnosis, and spatiotemporal synchronization of tin droplets and laser. Shadowgraph technology is used to determine the stability of tin droplets. The characteristics of the DG were analyzed, and the operation parameter maps are provided. By varying operating frequencies from 18.4 kHz to 49.3 kHz, the diameter and spacing of droplets can be adjusted in the ranges of 120~200 μm and 200~1100 μm respectively. Both theoretical calculations and experimental results show that tin droplets keep high stability when the operation parameters locate at the optimal range. The long-term lateral stability is also proven under a high degree of vacuum. Additionally, the application feasibility of the DG system is verified by the experiments of laser impact tin droplets.","PeriodicalId":18526,"journal":{"name":"Measurement Science and Technology","volume":"2 3","pages":""},"PeriodicalIF":2.7000,"publicationDate":"2023-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measurement Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6501/ad1810","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Droplet-based laser-produced plasma source shows enormous significance in extreme ultraviolet lithography, which places high demands on the stability of tin droplets. This paper presents a tin droplet target system including the tin droplet generator (DG), droplet diagnosis, and spatiotemporal synchronization of tin droplets and laser. Shadowgraph technology is used to determine the stability of tin droplets. The characteristics of the DG were analyzed, and the operation parameter maps are provided. By varying operating frequencies from 18.4 kHz to 49.3 kHz, the diameter and spacing of droplets can be adjusted in the ranges of 120~200 μm and 200~1100 μm respectively. Both theoretical calculations and experimental results show that tin droplets keep high stability when the operation parameters locate at the optimal range. The long-term lateral stability is also proven under a high degree of vacuum. Additionally, the application feasibility of the DG system is verified by the experiments of laser impact tin droplets.
期刊介绍：
Measurement Science and Technology publishes articles on new measurement techniques and associated instrumentation. Papers that describe experiments must represent an advance in measurement science or measurement technique rather than the application of established experimental technique. Bearing in mind the multidisciplinary nature of the journal, authors must provide an introduction to their work that makes clear the novelty, significance, broader relevance of their work in a measurement context and relevance to the readership of Measurement Science and Technology. All submitted articles should contain consideration of the uncertainty, precision and/or accuracy of the measurements presented.
Subject coverage includes the theory, practice and application of measurement in physics, chemistry, engineering and the environmental and life sciences from inception to commercial exploitation. Publications in the journal should emphasize the novelty of reported methods, characterize them and demonstrate their performance using examples or applications.
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