{"title":"Influence of Oxygen and Nitrogen Flow Ratios on the Microstructure Evolution in AlCrTaTiZr High-Entropy Oxynitride Films","authors":"Yung-Chu Liang, Ching-Yin Lee, Miao-I Lin, Ting-En Shen, Jung-Fan Hung, Jien-Wei Yeh, Che-Wei Tsai","doi":"10.3390/coatings14091199","DOIUrl":null,"url":null,"abstract":"This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (RN = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After annealing at 900 °C, the hardness of all films was further increased. The film with a nitrogen flow ratio 40 times higher than oxygen exhibited the highest hardness of 21.8 GPa, along with superior mechanical performance. These findings highlight the potential of high-entropy oxynitride films for applications requiring high wear resistance and adhesion.","PeriodicalId":10520,"journal":{"name":"Coatings","volume":null,"pages":null},"PeriodicalIF":2.9000,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Coatings","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3390/coatings14091199","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
引用次数: 0
Abstract
This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (RN = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After annealing at 900 °C, the hardness of all films was further increased. The film with a nitrogen flow ratio 40 times higher than oxygen exhibited the highest hardness of 21.8 GPa, along with superior mechanical performance. These findings highlight the potential of high-entropy oxynitride films for applications requiring high wear resistance and adhesion.
CoatingsMaterials Science-Surfaces, Coatings and Films
CiteScore
5.00
自引率
11.80%
发文量
1657
审稿时长
1.4 months
期刊介绍：
Coatings is an international, peer-reviewed open access journal of coatings and surface engineering. It publishes reviews, research articles, communications and technical notes. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. Full experimental and/or methodical details must be provided. There are, in addition, unique features of this journal:
* manuscripts regarding research proposals and research ideas will be particularly welcomed
* electronic files or software regarding the full details of the calculation and experimental procedure - if unable to be published in a normal way - can be deposited as supplementary material
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