Marshall B. Frye , Jonathan R. Chin , Matthew Barone , Steven E. Zeltmann , Lauren M. Garten
{"title":"Enhancing the conductivity and crystallinity of (111) platinum films via a two-temperature deposition and substrate annealing","authors":"Marshall B. Frye , Jonathan R. Chin , Matthew Barone , Steven E. Zeltmann , Lauren M. Garten","doi":"10.1016/j.scriptamat.2024.116442","DOIUrl":null,"url":null,"abstract":"<div><div>Developing routes to deposit highly conductive (111) oriented platinum films with sub-nanometer roughness will provide a platform to develop unique hexagonal and (111) oriented cubic materials. A two-temperature e-beam deposition process is proposed for the growth of (111) oriented platinum films on Al<sub>2</sub>O<sub>3</sub> to simultaneously induce crystallographic texturing, improve conductivity, and reduce surface roughness. Depositing an initial platinum layer at 700 °C induces texturing then subsequently depositing at 500 °C promotes planar growth. The resulting (111) platinum films exhibit a narrow rocking curve full width at half maximum of 0.004°, a surface roughness of 0.20 nm, and conductivity of 8.99 × 10<sup>6</sup> S/m simultaneously—reaching metrics that are not currently available by other deposition methods. The e-beam deposition methodology developed in this study provides a route to increase the performance of platinum as a conductive substrate.</div></div>","PeriodicalId":423,"journal":{"name":"Scripta Materialia","volume":"256 ","pages":"Article 116442"},"PeriodicalIF":5.3000,"publicationDate":"2024-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Scripta Materialia","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1359646224004779","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Developing routes to deposit highly conductive (111) oriented platinum films with sub-nanometer roughness will provide a platform to develop unique hexagonal and (111) oriented cubic materials. A two-temperature e-beam deposition process is proposed for the growth of (111) oriented platinum films on Al2O3 to simultaneously induce crystallographic texturing, improve conductivity, and reduce surface roughness. Depositing an initial platinum layer at 700 °C induces texturing then subsequently depositing at 500 °C promotes planar growth. The resulting (111) platinum films exhibit a narrow rocking curve full width at half maximum of 0.004°, a surface roughness of 0.20 nm, and conductivity of 8.99 × 106 S/m simultaneously—reaching metrics that are not currently available by other deposition methods. The e-beam deposition methodology developed in this study provides a route to increase the performance of platinum as a conductive substrate.
期刊介绍:
Scripta Materialia is a LETTERS journal of Acta Materialia, providing a forum for the rapid publication of short communications on the relationship between the structure and the properties of inorganic materials. The emphasis is on originality rather than incremental research. Short reports on the development of materials with novel or substantially improved properties are also welcomed. Emphasis is on either the functional or mechanical behavior of metals, ceramics and semiconductors at all length scales.