Efficient chemical mechanical polishing of W promoted by Fenton-like reaction between Cu2+ and H2O2

IF 4.7 1区材料科学 Q1 METALLURGY & METALLURGICAL ENGINEERING Transactions of Nonferrous Metals Society of China Pub Date : 2025-01-01 Epub Date: 2025-01-23 DOI:10.1016/S1003-6326(24)66678-1

Hong-yu CHEN , Lin WANG , Feng PENG , Meng-meng SHEN , Wei HANG , Tufa Habtamu BERI , Hui-bin ZHANG , Jun ZHAO , Yun-xiao HAN , Bing-hai LÜ

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Abstract

The Fenton-like reaction between Cu²⁺ and H₂O₂ was employed in chemical mechanical polishing to achieve efficient and high-quality processing of tungsten. The microstructure evolution and material removal rate of tungsten during polishing process were investigated via scanning electron microscopy, X-ray photoelectron spectroscopy, ultraviolet−visible spectrophotometry, and electrochemical experiments. The passivation behavior and material removal mechanism were discussed. Results show that the use of mixed H₂O₂+Cu(NO₃)₂ oxidant can achieve higher polishing efficiency and surface quality compared with the single oxidant Cu(NO₃)₂ or H₂O₂. The increase in material removal rate is attributed to the rapid oxidation of W into WO₃ via the chemical reaction between the substrate and hydroxyl radicals produced by the Fenton-like reaction. In addition, material removal rate and static etch rate exhibit significantly different dependencies on the concentration of Cu(NO₃)₂, while the superior oxidant for achieving the balance between polishing efficiency and surface quality is 0.5 wt.% H₂O₂ +1.0 wt.% Cu(NO₃)₂.

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Cu2+与H2O2类芬顿反应促进W的高效化学机械抛光

将Cu2+与H2O2之间的类芬顿反应应用于化学机械抛光，实现了钨的高效、高质量加工。通过扫描电镜、x射线光电子能谱、紫外可见分光光度法和电化学实验研究了抛光过程中钨的微观结构演变和材料去除率。讨论了钝化行为和材料去除机理。结果表明，与单一氧化剂Cu(NO3)2或H2O2相比，使用混合氧化剂H2O2+Cu(NO3)2可以获得更高的抛光效率和表面质量。材料去除率的提高是由于底物与类芬顿反应产生的羟基自由基发生化学反应，W迅速氧化为WO3。此外，材料去除率和静态蚀刻速率对Cu(NO3)2浓度的依赖性显著不同，达到抛光效率和表面质量平衡的最佳氧化剂为0.5 wt.% H2O2 +1.0 wt.% Cu(NO3)2。

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来源期刊

Transactions of Nonferrous Metals Society of China 工程技术-冶金工程

CiteScore

7.40

自引率

17.80%

发文量

8456

审稿时长

3.6 months

期刊介绍： The Transactions of Nonferrous Metals Society of China (Trans. Nonferrous Met. Soc. China), founded in 1991 and sponsored by The Nonferrous Metals Society of China, is published monthly now and mainly contains reports of original research which reflect the new progresses in the field of nonferrous metals science and technology, including mineral processing, extraction metallurgy, metallic materials and heat treatments, metal working, physical metallurgy, powder metallurgy, with the emphasis on fundamental science. It is the unique preeminent publication in English for scientists, engineers, under/post-graduates on the field of nonferrous metals industry. This journal is covered by many famous abstract/index systems and databases such as SCI Expanded, Ei Compendex Plus, INSPEC, CA, METADEX, AJ and JICST.