Sergey V. Bulyarskiy, Mikhail S. Molodenskiy, Pavel E. L'vov, Alexander A. Pavlov, Yuri V. Anufriev, Yuri P. Shaman, Georgy G. Gusarov, Kirill A. Modestov, Artem V. Sysa, Alexander R. Shevchenko
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引用次数: 0
Abstract
The paper presents an experimental and theoretical study of PECVD growth of carbon nanotube arrays on silicon planar substrates with iron as a catalyst. It is shown that an increase in the total gas pressure in the reactor causes the plasma temperature to drop, which leads to a decrease in the pyrolysis rate. At low pressures and high pyrolysis rates, a layer of amorphous carbon forms on the surface of the catalyst and carbon nanotubes, which creates a barrier to carbon penetration into the catalyst, slowing down the growth of nanotubes. At high gas pressures, the growth rate of nanotubes is higher, which leads to an increase in the content of defects in them.
期刊介绍：
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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