{"title":"Investigating the Rapid Failure of Focused Ion Beam Deposited Electrical Contacts: An In-Situ and Ultrafast Transmission Electron Microscopy Approach","authors":"Suman Kumari, Mason Freund, Volkan Ortalan","doi":"10.1021/acs.nanolett.4c05269","DOIUrl":null,"url":null,"abstract":"Ultrafast transmission electron microscopy (UTEM) is a valuable tool for investigating the intermediate stages of fast dynamic material processes. Here, we utilized single-shot imaging in UTEM to reveal the short-lived transient stages involved in the pulsed electrical failure of focused ion beam (FIB) fabricated platinum contacts. Particularly, the failure occurring in the halo region formed due to the broadening of the metal deposits during FIB deposition was investigated. The failure was initiated rapidly, in less than 100 ns, upon the application of a voltage pulse. These transient stages were generated for further characterization by applying voltage pulses of varying pulse widths in a conventional TEM. We identified different stages in the failure, leading to the decomposition of the substrate underneath the deposition. Simulations were performed in COMSOL Multiphysics to estimate the temperature increase resulting from Joule heating. Furthermore, various mechanisms triggered at different times leading to complete failure are discussed.","PeriodicalId":53,"journal":{"name":"Nano Letters","volume":"18 1","pages":""},"PeriodicalIF":9.6000,"publicationDate":"2025-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nano Letters","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1021/acs.nanolett.4c05269","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Ultrafast transmission electron microscopy (UTEM) is a valuable tool for investigating the intermediate stages of fast dynamic material processes. Here, we utilized single-shot imaging in UTEM to reveal the short-lived transient stages involved in the pulsed electrical failure of focused ion beam (FIB) fabricated platinum contacts. Particularly, the failure occurring in the halo region formed due to the broadening of the metal deposits during FIB deposition was investigated. The failure was initiated rapidly, in less than 100 ns, upon the application of a voltage pulse. These transient stages were generated for further characterization by applying voltage pulses of varying pulse widths in a conventional TEM. We identified different stages in the failure, leading to the decomposition of the substrate underneath the deposition. Simulations were performed in COMSOL Multiphysics to estimate the temperature increase resulting from Joule heating. Furthermore, various mechanisms triggered at different times leading to complete failure are discussed.
期刊介绍:
Nano Letters serves as a dynamic platform for promptly disseminating original results in fundamental, applied, and emerging research across all facets of nanoscience and nanotechnology. A pivotal criterion for inclusion within Nano Letters is the convergence of at least two different areas or disciplines, ensuring a rich interdisciplinary scope. The journal is dedicated to fostering exploration in diverse areas, including:
- Experimental and theoretical findings on physical, chemical, and biological phenomena at the nanoscale
- Synthesis, characterization, and processing of organic, inorganic, polymer, and hybrid nanomaterials through physical, chemical, and biological methodologies
- Modeling and simulation of synthetic, assembly, and interaction processes
- Realization of integrated nanostructures and nano-engineered devices exhibiting advanced performance
- Applications of nanoscale materials in living and environmental systems
Nano Letters is committed to advancing and showcasing groundbreaking research that intersects various domains, fostering innovation and collaboration in the ever-evolving field of nanoscience and nanotechnology.