Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography

R. Zvagelsky, Frederik Mayer, D. Beutel, C. Rockstuhl, G. Gomard, M. Wegener
{"title":"Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography","authors":"R. Zvagelsky, Frederik Mayer, D. Beutel, C. Rockstuhl, G. Gomard, M. Wegener","doi":"10.37188/lam.2022.039","DOIUrl":null,"url":null,"abstract":"In recent years, multi-photon 3D laser printing has become a widely used tool for the fabrication of micro- and nanostructures for a large variety of applications. Typically, thorough sample characterisation is key for an efficient optimisation of the printing process. To date, three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures, that is, using ex-situ approaches. In contrast, in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed microstructures. Along these lines, we present and characterise a Fourier-domain optical coherence tomography (FD-OCT) system that can be readily integrated into an existing 3D laser lithography setup. We demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid photoresist. In such samples, local reflectivity arises from the (refractive-index) contrasts between the polymerised and non-polymerised regions. Thus, the refractive index of the printed material can be extracted. Furthermore, we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after printing. Supported by transfer-matrix calculations, we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer matrix. Finally, we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.","PeriodicalId":56519,"journal":{"name":"光:先进制造(英文)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"光:先进制造(英文)","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.37188/lam.2022.039","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7

Abstract

In recent years, multi-photon 3D laser printing has become a widely used tool for the fabrication of micro- and nanostructures for a large variety of applications. Typically, thorough sample characterisation is key for an efficient optimisation of the printing process. To date, three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures, that is, using ex-situ approaches. In contrast, in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed microstructures. Along these lines, we present and characterise a Fourier-domain optical coherence tomography (FD-OCT) system that can be readily integrated into an existing 3D laser lithography setup. We demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid photoresist. In such samples, local reflectivity arises from the (refractive-index) contrasts between the polymerised and non-polymerised regions. Thus, the refractive index of the printed material can be extracted. Furthermore, we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after printing. Supported by transfer-matrix calculations, we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer matrix. Finally, we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
光学相干层析成像用于多光子三维激光打印的原位诊断
近年来,多光子3D激光打印已成为一种广泛应用于微纳米结构制造的工具。通常,彻底的样品表征是有效优化印刷过程的关键。迄今为止,三维显微检查通常是在成品3D打印微观结构上进行的,即使用非原位方法。相比之下,原位3D表征工具对于快速评估3D打印微结构的质量和性能是可取的。沿着这些思路,我们提出并描述了一个傅立叶域光学相干层析成像(FD-OCT)系统,该系统可以很容易地集成到现有的3D激光光刻装置中。我们通过检查浸泡在液体光刻胶中的不同3D打印聚合物微结构来展示其功能。在这些样品中,局部反射率来自聚合区和非聚合区之间的(折射率)对比。因此,可以提取打印材料的折射率。此外,我们证明了聚合物-单体过渡的反射率在印刷后表现出时间依赖的行为。在转移矩阵计算的支持下,我们用源于单体扩散到聚合物基体的随时间变化的梯度指数转变来解释这种效应。最后,我们展示了打印结构的典型3D重建,可以很容易地与3D计算机设计进行比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
CiteScore
10.90
自引率
0.00%
发文量
0
期刊最新文献
Ultra-wideband Waveguide-coupled Photodiodes Heterogeneously Integrated on a Thin-film Lithium Niobate Platform Quantitative phase imaging (QPI) through random diffusers using a diffractive optical network Front Matter: Volume 12507 Research on key technology of compound polishing of off-axis parabolic mirror Precision polishing of the mandrel for x-ray grazing incidence mirrors in the Einstein probe
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1