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Ultra-wideband Waveguide-coupled Photodiodes Heterogeneously Integrated on a Thin-film Lithium Niobate Platform 超宽带波导耦合光电二极管在铌酸锂薄膜平台上的异质集成
Pub Date : 2023-05-13 DOI: 10.37188/lam.2023.030
Chaojiong Wei, Youren Yu, Ziyun Wang, Lin Jiang, Z. Zeng, Jia Ye, X. Zou, W. Pan, Xiaojun Xie, Lian-shan Yan
With the advantages of large electro-optical coefficient, wide transparency window, and strong optical confinement, thin-film lithium niobate (TFLN) technique has enabled the development of various high-performance optoelectronics devices, ranging from the ultra-wideband electro-optic modulators to the high-efficient quantum sources. However, the TFLN platform does not natively promise lasers and photodiodes. This study presents an InP/InGaAs modified uni-traveling carrier (MUTC) photodiodes heterogeneously integrated on the TFLN platform with a record-high 3-dB bandwidth of 110 GHz and a responsivity of 0.4 A/W at a 1550-nm wavelength. It is implemented on a wafer-level TFLN-InP heterogeneous integration platform and is suitable for the large-scale, multi-function, and high-performance TFLN photonic integrated circuits.
薄膜铌酸锂(TFLN)技术具有电光系数大、透明窗宽、光学约束强等优点,使超宽带电光调制器和高效量子源等各种高性能光电子器件得以发展。然而,TFLN平台本身并没有承诺激光器和光电二极管。本研究提出了一种非均匀集成在TFLN平台上的InP/InGaAs改性单行波载流子(MUTC)光电二极管,其在1550nm波长下具有创纪录的110GHz的3dB带宽和0.4A/W的响应率。它在晶圆级TFLN-InP异质集成平台上实现,适用于大规模、多功能、高性能的TFLN光子集成电路。
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引用次数: 0
Quantitative phase imaging (QPI) through random diffusers using a diffractive optical network 利用衍射光网络通过随机扩散器进行定量相位成像
Pub Date : 2023-01-19 DOI: 10.37188/lam.2023.017
Yuhang Li, Yilin Luo, Deniz Mengu, Bijie Bai, Aydogan Ozcan
Quantitative phase imaging (QPI) is a label-free computational imaging technique used in various fields, including biology and medical research. Modern QPI systems typically rely on digital processing using iterative algorithms for phase retrieval and image reconstruction. Here, we report a diffractive optical network trained to convert the phase information of input objects positioned behind random diffusers into intensity variations at the output plane, all-optically performing phase recovery and quantitative imaging of phase objects completely hidden by unknown, random phase diffusers. This QPI diffractive network is composed of successive diffractive layers, axially spanning in total ~70 wavelengths; unlike existing digital image reconstruction and phase retrieval methods, it forms an all-optical processor that does not require external power beyond the illumination beam to complete its QPI reconstruction at the speed of light propagation. This all-optical diffractive processor can provide a low-power, high frame rate and compact alternative for quantitative imaging of phase objects through random, unknown diffusers and can operate at different parts of the electromagnetic spectrum for various applications in biomedical imaging and sensing. The presented QPI diffractive designs can be integrated onto the active area of standard CCD/CMOS-based image sensors to convert an existing optical microscope into a diffractive QPI microscope, performing phase recovery and image reconstruction on a chip through light diffraction within passive structured layers.
定量相位成像(QPI)是一种无标记的计算成像技术,应用于包括生物学和医学研究在内的各个领域。现代QPI系统通常依赖于使用迭代算法进行相位检索和图像重建的数字处理。在这里,我们报道了一个经过训练的衍射光网络,可以将位于随机扩散器后面的输入物体的相位信息转换为输出平面上的强度变化,对完全被未知随机相位扩散器隐藏的相位物体进行全光相位恢复和定量成像。该QPI衍射网络由连续的衍射层组成,轴向共跨越约70个波长;与现有的数字图像重建和相位恢复方法不同,它形成了一个全光处理器,不需要照明光束以外的外部功率就可以以光的传播速度完成QPI重建。这种全光衍射处理器可以提供低功耗、高帧率和紧凑的替代方案,通过随机、未知的扩散器对相位物体进行定量成像,并且可以在电磁频谱的不同部分工作,用于生物医学成像和传感中的各种应用。所提出的QPI衍射设计可以集成到标准CCD/ cmos图像传感器的有源区域,将现有的光学显微镜转换为衍射QPI显微镜,通过无源结构层内的光衍射在芯片上进行相位恢复和图像重建。
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引用次数: 2
Research on key technology of compound polishing of off-axis parabolic mirror 离轴抛物面镜复合抛光关键技术研究
Pub Date : 2023-01-09 DOI: 10.1117/12.2655107
deqing zhu, CHuYi Fan, JianGuo Fang, Guo Xiaoyue, Li Yang
Off-axis aspherical surface have the advantages of excellent optical performance and simplified system structure. In order to satisfy the requirements of high-precision off-axis aspheric mirror in the telescopic system of some equipment, the research on ultra-precision manufacturing technology of off-axis aspheric mirror is carried out, and a composite polishing and detection technology based on robot-controlled optical surfacing and ion beam figuring is proposed. In the processing stage, the robotic flexible polishing and gadget polishing are used to quickly grind and polish the aspheric surface, and then the pitch lap is used to smooth the mid-spatial-frequency errors. Finally the aspheric surface is machined to the final requirement by ion beam figuring. In the detection stage, the coordinate measuring machine is used to detect the surface shape in the grinding stage, and the stigmatic null test is used to detect the aspheric shape in the fine polishing stage. Using the proposed method, the off-axis aspheric surface of a caliber 408mm is machined and tested, and the final surface figure error was 0.015 λ (λ = 632.8nm), which meets the requirements of the index.
离轴非球面具有光学性能好、系统结构简化等优点。为满足某设备伸缩系统对高精度离轴非球面反射镜的要求,开展了离轴非球面反射镜的超精密制造技术研究,提出了一种基于机器人控制光学堆焊和离子束计算的复合抛光检测技术。在加工阶段,采用机器人柔性抛光和小工具抛光对非球面进行快速磨削和抛光,然后采用俯仰搭接对中频误差进行平滑处理。最后通过离子束加工将非球面加工到最终要求。在检测阶段,采用三坐标测量机对磨削阶段的表面形状进行检测,在精细抛光阶段采用柱头零检验对非球面形状进行检测。采用该方法对口径408mm的离轴非球面进行了加工和测试,最终得到的曲面图形误差为0.015 λ (λ = 632.8nm),满足指标要求。
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引用次数: 0
Precision polishing of the mandrel for x-ray grazing incidence mirrors in the Einstein probe 爱因斯坦探测器x射线掠入射镜芯轴的精密抛光
Pub Date : 2023-01-09 DOI: 10.1117/12.2656669
Jiadai Xue, Qiuyan Liao, Yutao Liu, Yangong Wu, Yuan Jin, Kaiji Wu, Duo Li, Zheng Qiao, Fei Ding, Yanji Yang, Bo Wang
Based on chemical-mechanical polishing and combining mechanical and tribochemical polishing techniques, a precision lapping method suitable for parabolic polishing specified by grazing incident X-rays is introduced. Various factors affecting the polishing process are analyzed, and the results show that the proposed method is consistent with Preston's equation and Hertz contact principle. Therefore, this paper proposes a general material removal model based on the above two methods. The mid and high-spatial frequency errors are demanded to reach the requirements with an angular resolution consistently < 6 arcsec HEW and a roughness of 0.3 nm rms (between 1 mm and 0.002 mm spatial frequency range). To achieve the conformal ultra-smooth polishing of focusing mirrors, the process of full-aperture super-smooth pitch polishing is investigated. The influences of key polishing parameters are revealed. The evolution of the surface topology has been studied. A polishing setup is established to carry out experimental polishing to verify the optimum processing parameters obtained by simulations and previous polishing tests. Besides, the effect of abrasive particle size on the roughness is also verified. The roughness of the polished mandrel is measured at different positions, and the optimum roughness reaches Ra 0.359 nm. The polishing approach can significantly reduce the surface roughness of the replication mandrel, satisfying the low energy band focusing requirement of grazing incidence X-ray mirrors.
以化学-机械抛光为基础,结合机械与摩擦化学抛光技术,提出了一种适用于掠入射x射线抛物面抛光的精密研磨方法。分析了影响抛光过程的各种因素,结果表明,该方法符合普雷斯顿方程和赫兹接触原理。因此,本文在上述两种方法的基础上提出了一种通用的材料去除模型。为了达到一致的角分辨率要求,需要中、高空间频率误差。HEW为6弧秒,粗糙度为0.3 nm rms(空间频率范围为1 mm至0.002 mm)。为了实现聚焦镜的共形超光滑抛光,研究了全孔径超光滑间距抛光工艺。揭示了关键抛光参数对抛光效果的影响。研究了表面拓扑结构的演化过程。建立了抛光装置进行实验抛光,以验证仿真和先前抛光试验获得的最佳加工参数。此外,还验证了磨料粒度对粗糙度的影响。对抛光后的心轴在不同位置的粗糙度进行了测量,其最佳粗糙度为Ra 0.359 nm。抛光方法可以显著降低复制芯棒的表面粗糙度,满足掠入射x射线反射镜的低能带聚焦要求。
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引用次数: 0
Front Matter: Volume 12507 封面:卷12507
Pub Date : 2023-01-09 DOI: 10.1117/12.2669890
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引用次数: 0
Holographic laser fabrication of 3D artificial compound μ-eyes 三维人工复合μ眼的全息激光制备
Pub Date : 2023-01-01 DOI: 10.37188/lam.2023.026
Lei Wang, W. Gong, Xiao-wen Cao, Yanhao Yu, S. Juodkazis, Qidai Chen
The demand for fast optical image acquisition without movable optical elements (e.g., for self-driving car technology) can be met using bioinspired 3D compound eyes. 3D laser processing strategies enable designable 3D structuring but suffer from low fabrication efficiency, which significantly limits their applications in producing complex 3D optical devices. Herein, we demonstrate a versatile yet simple wet-etching-assisted holographic laser fabrication method for the development of 3D compound eyes. Artificial compound μ eyes can be readily fabricated by programming a 3D spot array for the parallel ablation of a curved fused silica surface, followed by controllable etching in a hydrofluoric (HF) acid solution. A 3D-concave-lens array made on a curved surface over an area of 100 μ m cross-section with each lenslet of 10 μ m radius was fabricated with high fidelity and excellent imaging/focusing quality. The resultant 3D-concave-lens can serve as a hard template for the mass production of soft compound eyes through soft lithography. Additionally, using a generative adversarial network (GAN)-based deep learning algorithm, image restoration was conducted for each lenslet, which retained a large field of view and significantly improved image quality. This method provides a simple solution to the requirements of compound μ -eyes required by Industry 4.0.
无需移动光学元件(例如自动驾驶汽车技术)的快速光学图像采集需求可以使用仿生3D复眼来满足。三维激光加工策略能够实现可设计的三维结构,但制造效率低,严重限制了其在复杂三维光学器件生产中的应用。在此,我们展示了一种多功能而简单的湿蚀刻辅助全息激光制造方法,用于开发3D复眼。通过编程三维点阵列,对弯曲的熔融二氧化硅表面进行平行烧蚀,然后在氢氟酸溶液中进行可控蚀刻,可以很容易地制备人工复合μ眼。在100 μ m截面的曲面上制作了一个三维凹透镜阵列,每个透镜的半径为10 μ m,具有高保真度和良好的成像/聚焦质量。所得到的三维凹透镜可作为软光刻技术批量生产软复眼的硬模板。此外,使用基于生成式对抗网络(GAN)的深度学习算法,对每个小透镜进行图像恢复,保留了较大的视场,显著提高了图像质量。该方法为工业4.0对复合μ眼的要求提供了一种简单的解决方案。
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引用次数: 0
Ultra-compact lithium niobate photonic chip for high-capacity and energy-efficient wavelength-division-multiplexing transmitters 用于高容量高能效波分复用发射机的超紧凑铌酸锂光子芯片
Pub Date : 2023-01-01 DOI: 10.37188/lam.2023.013
Hongxuan Liu, Bingcheng Pan, Yishu Huang, Jianghao He, Ming Zhang, Zejie Yu, Liu Liu, Yaocheng Shi, D. Dai
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引用次数: 2
Single-end hybrid Rayleigh Brillouin and Raman distributed fibre-optic sensing system 单端混合瑞利-布里渊-拉曼分布式光纤传感系统
Pub Date : 2023-01-01 DOI: 10.37188/lam.2023.016
Linjing Huang, Xinyu Fan, H. He, Lian-shan Yan, Zuyuan He
: Backscattered lightwaves from an optical fibre are used to realise distributed fibre optic sensing (DFOS) systems for measuring various parameters. Rayleigh, Brillouin, and Raman backscattering provide different sensitivities to different measurands and have garnered the attention of researchers. A system combining the three principles above can effectively separate the measured strain and temperature completely as well as provide measurements of both dynamic and static parameters. However, the combined system is extremely complicated if the three systems are independent of each other. Hence, we propose a single-end hybrid DFOS system that uses two successive pulses to realise the Brillouin amplification of Rayleigh backscattering lightwaves for combining Rayleigh and Brillouin systems. A 3-bit pulse-coding method is employed to demodulate the Raman scattering of the two pulses to integrate Raman optical time-domain reflectometry into the hybrid system. Using this hybrid scheme, a simultaneous measurement of multiple parameters is realised, and a favourable measurement accuracy is achieved.
来自光纤的后向散射光波用于实现分布式光纤传感(DFOS)系统,用于测量各种参数。瑞利散射、布里渊散射和拉曼散射对不同的测量提供了不同的灵敏度,并引起了研究人员的注意。结合上述三个原理的系统可以有效地将测量的应变和温度完全分离,并提供动态和静态参数的测量。然而,如果这三个系统相互独立,则组合系统将非常复杂。因此,我们提出了一种单端混合DFOS系统,该系统使用两个连续脉冲实现瑞利和布里渊系统相结合的瑞利后向散射光波的布里渊放大。采用3位脉冲编码方法对两个脉冲的拉曼散射进行解调,将拉曼光时域反射技术集成到混合系统中。利用这种混合方案,可以实现多参数的同时测量,并取得了较好的测量精度。
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引用次数: 1
Two-photon photopolymerization directly initiated by spiropyran photochromic molecules 由螺吡喃光致变色分子直接引发的双光子光聚合
Pub Date : 2023-01-01 DOI: 10.37188/lam.2023.004
Dandan Ge, J. Aubard, Erell Bodinier, S. Jradi, S. Lau-Truong, N. Félidj, R. Bachelot, A. Baudrion
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引用次数: 3
Dual-point noncoaxial rotational Doppler effect towards synthetic OAM light fields for real-time rotating axis detection 双点非同轴旋转多普勒效应合成OAM光场实时旋转轴检测
Pub Date : 2023-01-01 DOI: 10.37188/lam.2023.027
Yanxiang Zhang, Zijing Zhang, Han Lin, Zhongquan Nie, Rui Feng, Yuan Zhao, B. Jia
noncoaxial rotational Doppler
非同轴旋转多普勒
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引用次数: 1
期刊
光:先进制造(英文)
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