Shiyi Luan, Fei Peng, Guoxing Zheng, Chengqun Gui, Yi Song, and Sheng Liu
{"title":"High-speed, large-area and high-precision fabrication of aspheric micro-lens array based on 12-bit direct laser writing lithography","authors":"Shiyi Luan, Fei Peng, Guoxing Zheng, Chengqun Gui, Yi Song, and Sheng Liu","doi":"10.37188/lam.2022.047","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":56519,"journal":{"name":"光:先进制造(英文)","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"光:先进制造(英文)","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.37188/lam.2022.047","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}