A high-density CMOS multi-modality joint sensor/stimulator array with 1024 pixels for holistic real-time cellular characterization

Abstract

This paper presents a fully integrated 1024-pixel world-first joint multi-modality sensor/stimulator array in CMOS for holistic real-time cell characterization. Each pixel supports extracellular voltage recording, optical detection, and cellular impedance measurement, as well as current-mode cellular stimulation. Four independent on-chip temperature sensors monitor the ambient temperature variation. The chip is implemented in a 130nm CMOS process with a pixel size of 58μm×58μm, achieving the largest array-size and smallest pixel for a multi-modality joint sensor/stimulator array in CMOS. The electrical and biological measurements demonstrate the utility of this high-density multi-modality array in cell-based assays for drug and chemical screening.