Process Optimization of Foil-Based Transient Liquid Phase Bonding for Die Attachment

M. Feißt, Jan Kustermann, A. Schumacher, Irina Spies, J. Wilde
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引用次数: 2

Abstract

In this work investigations on TLP-bonding with a binary alloy consisting of Ag and Sn are presented. This joining technology allows stress-reduced mounting with a temperature-stable metallic interconnection. To analyze the influence of the process parameters a bonding-press that is capable of high heating rates up to 25 K/s was built and methods of DoE were used. The bonding pressure showed the most significant impact, while heating rate, time and temperature had a minor influence. The influence on the microporosity is demonstrated by SEM micrographs of ion-milled cross sections.
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基于箔片的瞬态液相粘接模具工艺优化
本文介绍了银锡二元合金与tlp键合的研究。这种连接技术可以通过温度稳定的金属互连来降低安装应力。为了分析工艺参数的影响,建立了加热速率高达25 K/s的键合机,并采用了DoE方法。粘结压力的影响最为显著,升温速率、时间和温度的影响较小。离子铣削截面的SEM显微图证明了离子铣削对微孔隙度的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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