Single contact optical beam induced currents (SCOBIC)-a new failure analysis technique

Abstract

The Single Contact Optical Beam Induced Currents (SCOBIC) is a new failure analysis technique. By connecting the substrate or power pins of an integrated circuit to the current amplifier, many junctions can be imaged. In contrast, in the optical beam induced current (OBIC) technique, only the junction directly connected to the current amplifier is imaged. The implementation of the SCOBIC approach is discussed and experimental results which validates the SCOBIC approach is presented. Application of the SCOBIC technique for CMOS devices is also discussed.