Kai Liu, Hung-Chih Chin, H. Lou, Kuan‐Chang Chang, Xinnan Lin
{"title":"Variation Investigation of Junction-less Transistor with Side-wall Charge-plasma Structure Induced by Line Edge Roughness","authors":"Kai Liu, Hung-Chih Chin, H. Lou, Kuan‐Chang Chang, Xinnan Lin","doi":"10.1109/ICSICT49897.2020.9278349","DOIUrl":null,"url":null,"abstract":"In this work, the fluctuations of the electrical characteristics including ON -current, OFF -current, subthreshold swing and threshold voltage, due to line edge roughness (LER) for double-gate charge-plasma junctionless transistor (CPJLT) and side-wall charge-plasma junctionless transistor (S-CPJLT) are explored. Results shows that S-CPJLT has less fluctuations in ON -current while maintaining similar performance of other electrical characteristics. Besides, S-CPJLT has larger ON-current, smaller OFF-current on average. This work indicates that S-CPJLT has greater potential in electronic device development.","PeriodicalId":6727,"journal":{"name":"2020 IEEE 15th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)","volume":"38 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2020-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 15th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT49897.2020.9278349","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this work, the fluctuations of the electrical characteristics including ON -current, OFF -current, subthreshold swing and threshold voltage, due to line edge roughness (LER) for double-gate charge-plasma junctionless transistor (CPJLT) and side-wall charge-plasma junctionless transistor (S-CPJLT) are explored. Results shows that S-CPJLT has less fluctuations in ON -current while maintaining similar performance of other electrical characteristics. Besides, S-CPJLT has larger ON-current, smaller OFF-current on average. This work indicates that S-CPJLT has greater potential in electronic device development.