G. Meinhardt, J. Kraft, B. Loffler, H. Enichlmair, G. Rohrer, E. Wachmann, M. Schrems, R. Swoboda, C. Seidl, H. Zimmermann
{"title":"High-speed blue-, red-, and infrared-sensitive photodiode integrated in a 0.35 /spl mu/m SiGe:C-BiCMOS process","authors":"G. Meinhardt, J. Kraft, B. Loffler, H. Enichlmair, G. Rohrer, E. Wachmann, M. Schrems, R. Swoboda, C. Seidl, H. Zimmermann","doi":"10.1109/IEDM.2005.1609477","DOIUrl":null,"url":null,"abstract":"A monolithically integrated photodiode with SiGe:C anode, which exhibits an excellent spectral responsivity of typically 0.21/0.42/0.53 A/W at 410/660/785nm and sub-ns rise/fall times, fabricated without process modification is presented. The bandwidth of the photodiode exceeds 1300/490/260MHz at 410/660/785nm favoring this device for universal optical storage applications. By applying a reverse bias voltage up to 10 V the photodiode features responsivities up to 0.6 A/W for 410nm due to avalanche multiplication","PeriodicalId":13071,"journal":{"name":"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.","volume":"77 1","pages":"803-806"},"PeriodicalIF":0.0000,"publicationDate":"2005-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2005.1609477","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
A monolithically integrated photodiode with SiGe:C anode, which exhibits an excellent spectral responsivity of typically 0.21/0.42/0.53 A/W at 410/660/785nm and sub-ns rise/fall times, fabricated without process modification is presented. The bandwidth of the photodiode exceeds 1300/490/260MHz at 410/660/785nm favoring this device for universal optical storage applications. By applying a reverse bias voltage up to 10 V the photodiode features responsivities up to 0.6 A/W for 410nm due to avalanche multiplication
提出了一种采用SiGe:C阳极的单片集成光电二极管,在410/660/785nm和sub-ns的上升/下降时间下,具有0.21/0.42/0.53 A/W的优异光谱响应率。该光电二极管在410/660/785nm处的带宽超过1300/490/260MHz,有利于该器件的通用光存储应用。通过施加反向偏置电压高达10 V,光电二极管具有响应高达0.6 a /W的410nm由于雪崩倍增