G. Szakmany, P. Krenz, A. Orlov, G. Bernstein, W. Porod
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Abstract
In order to demonstrate the feasibility of this approach, we report the measurements of the Seebeck coefficients of a palladium-gold and a palladium-chrome nanowire (70 nm wide and 50 nm thick) thermocouple. The thermocouple, heater, and thermometers were fabricated on top of 640 nm of thermally grown SiO2 on a silicon wafer using electron beam lithography and electron beam evaporation.
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