C. Rembe, H. Aschemann, S. aus der Wiesche, E. Hofer, H. Debéda, J. Mohr, U. Wallrabe
{"title":"Nontactile reliability testing of a micro optical attenuator","authors":"C. Rembe, H. Aschemann, S. aus der Wiesche, E. Hofer, H. Debéda, J. Mohr, U. Wallrabe","doi":"10.1109/RELPHY.2000.843902","DOIUrl":null,"url":null,"abstract":"The reliability investigations presented in this paper have been performed on a micro opto electro mechanical switch developed for switching and attenuation of light propagation in optical fibers. It is demonstrated that high-speed cine photomicrography together with model based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro electro mechanical systems (MEMS).","PeriodicalId":6387,"journal":{"name":"2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)","volume":"199 1","pages":"123-128"},"PeriodicalIF":0.0000,"publicationDate":"2000-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RELPHY.2000.843902","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
The reliability investigations presented in this paper have been performed on a micro opto electro mechanical switch developed for switching and attenuation of light propagation in optical fibers. It is demonstrated that high-speed cine photomicrography together with model based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro electro mechanical systems (MEMS).
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