{"title":"Piezoelectric Micropump Driving Module with Programmable Slew-Rate and Dead-Time","authors":"M. Mozek, B. Pecar","doi":"10.33180/infmidem2019.206","DOIUrl":null,"url":null,"abstract":": High efficiency piezoelectric micropump driving module with programmable slew-rate and dead-time has been designed, implemented and characterized for driving custom made piezoelectric micropumps. Developed driver enables independent setting of several rectangular output signal parameters, such as frequency, positive and negative amplitudes, slew-rates, dead time, and modes of operation (pump/valve). Implemented driver can achieve amplitudes up to 250 VPP on a frequency range from DC to 1 kHz, slew-rate up to 18 V/µs at maximum power consumption 1.6 W (180 mA @ 9 V). In comparison with our previous driver with RC charge/discharge signal shape, presented version increases air flow capability of micropumps from 1.6 sccm to 4.2 sccm. It enables driving of 200 µm thick PZT actuators with 12 nF capacitance.","PeriodicalId":56293,"journal":{"name":"Informacije Midem-Journal of Microelectronics Electronic Components and Materials","volume":"87 3 1","pages":""},"PeriodicalIF":0.6000,"publicationDate":"2019-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Informacije Midem-Journal of Microelectronics Electronic Components and Materials","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.33180/infmidem2019.206","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 1
Abstract
: High efficiency piezoelectric micropump driving module with programmable slew-rate and dead-time has been designed, implemented and characterized for driving custom made piezoelectric micropumps. Developed driver enables independent setting of several rectangular output signal parameters, such as frequency, positive and negative amplitudes, slew-rates, dead time, and modes of operation (pump/valve). Implemented driver can achieve amplitudes up to 250 VPP on a frequency range from DC to 1 kHz, slew-rate up to 18 V/µs at maximum power consumption 1.6 W (180 mA @ 9 V). In comparison with our previous driver with RC charge/discharge signal shape, presented version increases air flow capability of micropumps from 1.6 sccm to 4.2 sccm. It enables driving of 200 µm thick PZT actuators with 12 nF capacitance.
期刊介绍：
Informacije MIDEM publishes original research papers in the fields of microelectronics, electronic components and materials. Review papers are published upon invitation only. Scientific novelty and potential interest for a wider spectrum of readers is desired. Authors are encouraged to provide as much detail as possible for others to be able to replicate their results. Therefore, there is no page limit, provided that the text is concise and comprehensive, and any data that does not fit within a classical manuscript can be added as supplementary material.
Topics of interest include:
Microelectronics,
Semiconductor devices,
Nanotechnology,
Electronic circuits and devices,
Electronic sensors and actuators,
Microelectromechanical systems (MEMS),
Medical electronics,
Bioelectronics,
Power electronics,
Embedded system electronics,
System control electronics,
Signal processing,
Microwave and millimetre-wave techniques,
Wireless and optical communications,
Antenna technology,
Optoelectronics,
Photovoltaics,
Ceramic materials for electronic devices,
Thick and thin film materials for electronic devices.
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