M. Wada, T. Ishikura, D. Nishide, B. Ito, Y. Yamazaki, Tatsuro Saito, A. Isobayashi, M. Kagaya, Takashi Matsumoto, M. Kitamura, A. Sakata, Masahito Watanabe, N. Sakuma, A. Kajita, T. Sakai
{"title":"Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst","authors":"M. Wada, T. Ishikura, D. Nishide, B. Ito, Y. Yamazaki, Tatsuro Saito, A. Isobayashi, M. Kagaya, Takashi Matsumoto, M. Kitamura, A. Sakata, Masahito Watanabe, N. Sakuma, A. Kajita, T. Sakai","doi":"10.1109/IITC.2013.6615599","DOIUrl":null,"url":null,"abstract":"The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.","PeriodicalId":6377,"journal":{"name":"2013 IEEE International Interconnect Technology Conference - IITC","volume":"46 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Interconnect Technology Conference - IITC","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2013.6615599","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.
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