Ryosuke Mochii, M. Fujii, Y. Ishikawa, Y. Sugawara, Nobutake Nodera, Takao Matsumoto, Y. Uraoka
{"title":"Off Current Reduction of BG poly-Si TFT by PLAS Process","authors":"Ryosuke Mochii, M. Fujii, Y. Ishikawa, Y. Sugawara, Nobutake Nodera, Takao Matsumoto, Y. Uraoka","doi":"10.1002/SDTP.12450","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22504,"journal":{"name":"The Japan Society of Applied Physics","volume":"67 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2018-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Japan Society of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/SDTP.12450","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}