Jung Han Lee, Jieun Lee, Min-Chul Sun, W. Lee, M. Uhm, Seonwook Hwang, I. Chung, D. M. Kim, Dae Hwan Kim, Byung-Gook Park
{"title":"Analysis of hysteresis characteristics of fabricated SiNW biosensor in aqueous environment with reference electrode","authors":"Jung Han Lee, Jieun Lee, Min-Chul Sun, W. Lee, M. Uhm, Seonwook Hwang, I. Chung, D. M. Kim, Dae Hwan Kim, Byung-Gook Park","doi":"10.1109/SNW.2012.6243305","DOIUrl":null,"url":null,"abstract":"A silicon nanowire field effect transistor (SiNW FET) was fabricated through the fabrication method compatible with that of MOSFET including back-end process without lift-off process. However, when it is working in an aqueous solution, the SiNW device as well as other transducer devices has various inherent instability problems such as hysteresis characteristics. We observed the hysteresis in DI water (DW) and confirmed that it is caused by mobile ion effect in DW with various experimental results.","PeriodicalId":6402,"journal":{"name":"2012 IEEE Silicon Nanoelectronics Workshop (SNW)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SNW.2012.6243305","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A silicon nanowire field effect transistor (SiNW FET) was fabricated through the fabrication method compatible with that of MOSFET including back-end process without lift-off process. However, when it is working in an aqueous solution, the SiNW device as well as other transducer devices has various inherent instability problems such as hysteresis characteristics. We observed the hysteresis in DI water (DW) and confirmed that it is caused by mobile ion effect in DW with various experimental results.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
