Field acceleration for oxide breakdown-can an accurate anode hole injection model resolve the E vs. 1/E controversy?

M. A. Alam, J. Bude, A. Ghetti
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引用次数: 109

Abstract

A simple model, based on the concept of Anode Hole Injection, explains a number of puzzling measurements of oxide lifetime as a function of applied voltage. We provide systematic explanations of these measurements, and explore its implications for gate oxide reliability.
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氧化击穿场加速——精确的阳极孔注入模型能否解决E与1/E的争议?
一个简单的模型,基于阳极孔注入的概念,解释了一些令人困惑的测量氧化寿命作为施加电压的函数。我们提供这些测量的系统解释,并探讨其对栅氧化物可靠性的影响。
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