S. Vollebregt, H. Schellevis, K. Beenakker, R. Ishihara
{"title":"Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst","authors":"S. Vollebregt, H. Schellevis, K. Beenakker, R. Ishihara","doi":"10.1109/IITC.2013.6615602","DOIUrl":null,"url":null,"abstract":"Vertically aligned carbon nanotubes (CNT) were fabricated using a novel CoAlcatalyst at substrate temperatures as low as 350°C and analysed using Raman spectroscopy. Electrical measurement structures were fabricated and characterized using CNT bundles grown at 400°C. The resulting I-V characteristics display a slight non-linearity, likely due to a nonoptimal top contact. The first measurement results indicate CoAl can be an attractive candidate for back-end integration of CNT.","PeriodicalId":6377,"journal":{"name":"2013 IEEE International Interconnect Technology Conference - IITC","volume":"77 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Interconnect Technology Conference - IITC","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2013.6615602","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Vertically aligned carbon nanotubes (CNT) were fabricated using a novel CoAlcatalyst at substrate temperatures as low as 350°C and analysed using Raman spectroscopy. Electrical measurement structures were fabricated and characterized using CNT bundles grown at 400°C. The resulting I-V characteristics display a slight non-linearity, likely due to a nonoptimal top contact. The first measurement results indicate CoAl can be an attractive candidate for back-end integration of CNT.
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