Effects of Carbon Ion Implantation on Surface Performance of Modified NiTi Shape Memory Alloy

Yanling Tian, Yuechao Zhao, Zhen Yang, Chengjuan Yang
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Abstract

In this paper, carbon ion implantation was performed on the surface of modified nitinol alloy (NiTi) wafers. NiTi wafers are modified by nanosecond laser followed with or without fluoroalkylsilane (FAS) modification process. The influences of carbon ion implantation on surface morphology, surface wettability and chemical compositions were assessed by scanning electronic microscope (SEM), goniometer and energy dispersive spectrometer (EDS) respectively. The results show that the effects of carbon implantation on modified NiTi surface have a strong relationship with FAS modification process. After the FAS modification, carbon ion implantation will change surface visually images by chemical influence but surface morphology didn’t change. The water contact angles (WCAs) will decrease by carbon ion implantation for all FAS modified surfaces in contrary to a magnification influence for wafers without FAS modification process. In addition, it turns out to be faint for carbon ion implantation to increase surface carbon content.
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碳离子注入对改性NiTi形状记忆合金表面性能的影响
在改性镍钛诺合金(NiTi)晶圆表面进行了碳离子注入。采用纳秒激光对镍钛晶片进行了加氟烷基硅烷(FAS)和不加氟烷基硅烷(FAS)改性。采用扫描电镜(SEM)、测角仪和能谱仪(EDS)分别评价了碳离子注入对表面形貌、表面润湿性和化学成分的影响。结果表明,碳注入对改性NiTi表面的影响与FAS改性过程密切相关。在FAS改性后,碳离子注入会通过化学作用改变表面视觉图像,但表面形貌没有改变。碳离子注入对表面的水接触角(WCAs)均有降低作用,而对未进行改性的硅片则有增大作用。此外,碳离子注入对表面碳含量的增加作用微弱。
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