Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552203
K. Guo, Defu Zhang, Huanan Chen, M. Ni, Y. Sui
The guiding flexure is generally used in the positioning mechanism for in-plane movement and nanometer level adjustment accuracy. In this paper, an axial adjusting mechanism for regulating optical element in ultra-precision optical system is designed utilizing the guiding flexures which are arranged in space so that the mechanism can obtain out of plane movement with high adjustment precision. The structure and working principle of the axial adjusting mechanism are described. The stiffness analysis model is established. The adjusting and guiding capabilities of the adjusting mechanism owing to the spatial arranged guiding flexures are analyzed by finite element analysis (FEA). And the relationships between the key dimensions of the guiding flexures and the characteristics of the adjusting mechanism are investigated. The results show that the compliance in Z-direction which characterizes the adjusting capability of the adjusting mechanism and the axial/lateral compliance ratio which characterizes the guiding capability are mainly influenced by the thickness and length of flexible hinges in the guiding flexure. Under the premise of the stress within 150 MPa, the compliance in Z-direction can reach 19.8 μm/N, and the axial/lateral compliance ratio can achieve about 170.
{"title":"Design of a Precise Axial Adjusting Mechanism with Three Guiding Flexures for Optical Element","authors":"K. Guo, Defu Zhang, Huanan Chen, M. Ni, Y. Sui","doi":"10.1109/3M-NANO.2018.8552203","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552203","url":null,"abstract":"The guiding flexure is generally used in the positioning mechanism for in-plane movement and nanometer level adjustment accuracy. In this paper, an axial adjusting mechanism for regulating optical element in ultra-precision optical system is designed utilizing the guiding flexures which are arranged in space so that the mechanism can obtain out of plane movement with high adjustment precision. The structure and working principle of the axial adjusting mechanism are described. The stiffness analysis model is established. The adjusting and guiding capabilities of the adjusting mechanism owing to the spatial arranged guiding flexures are analyzed by finite element analysis (FEA). And the relationships between the key dimensions of the guiding flexures and the characteristics of the adjusting mechanism are investigated. The results show that the compliance in Z-direction which characterizes the adjusting capability of the adjusting mechanism and the axial/lateral compliance ratio which characterizes the guiding capability are mainly influenced by the thickness and length of flexible hinges in the guiding flexure. Under the premise of the stress within 150 MPa, the compliance in Z-direction can reach 19.8 μm/N, and the axial/lateral compliance ratio can achieve about 170.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"96-100"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74712517","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552205
Shuang Wang, Chang Liu, Yanyan Wang
A simple strategy which combines the controlled solvent evaporation and hydrophilic-hydrophobic pattern to allow assembling gold nanorods (GNRs) on a flat substrate with arbitrary shapes is presented in this work. Soft polydimethylsiloxane (PDMS) template as a pattern transfer stamp were utilized and transferred the structures onto the substrate successfully. By tuning the structures and sizes of templates, oriented large area lateral aligned GNRs arrays were fabricated as expected. Scan electron microscopy (SEM) images revealed that GNRs had been precisely placed as expected and the assembly is uniform.
{"title":"Precisely Lateral Alignment of Gold Nanorods Array via Hydrophilic-Hydrophobic Pattern","authors":"Shuang Wang, Chang Liu, Yanyan Wang","doi":"10.1109/3M-NANO.2018.8552205","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552205","url":null,"abstract":"A simple strategy which combines the controlled solvent evaporation and hydrophilic-hydrophobic pattern to allow assembling gold nanorods (GNRs) on a flat substrate with arbitrary shapes is presented in this work. Soft polydimethylsiloxane (PDMS) template as a pattern transfer stamp were utilized and transferred the structures onto the substrate successfully. By tuning the structures and sizes of templates, oriented large area lateral aligned GNRs arrays were fabricated as expected. Scan electron microscopy (SEM) images revealed that GNRs had been precisely placed as expected and the assembly is uniform.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 Suppl 1 1","pages":"74-78"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79764500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552191
Li Wang, Y. Leng, Yanjun Sun, Lianhe Dong
Fano resonance of metallic nanostructure is good for reducing the irradiation loss. Fano resonance of metallic nanostructure is also could improve the spectral resolution. Due to its unique sensitivity, Fano resonance is widely used in physics and engineering fields such as optical sensors, optical switches and electromagnetically induced transparent resonators. In this paper, time-domain finite difference method is used to design a kind of Y-type gold periodic nanorods array, which has obvious Fano resonance phenomenon at 1.12-μm wavelength. When the array structural parameters change, the Fano resonance valley has a dramatic movement. The Y-type gold nanoarray structures have better sensing characteristics, and its figure of merit is 10.68. It shows the special nanoarray can be used for infrared sensors.
{"title":"Sensing Characteristics of Fano Resonance in Y-shaped Gold Nanorods Array","authors":"Li Wang, Y. Leng, Yanjun Sun, Lianhe Dong","doi":"10.1109/3M-NANO.2018.8552191","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552191","url":null,"abstract":"Fano resonance of metallic nanostructure is good for reducing the irradiation loss. Fano resonance of metallic nanostructure is also could improve the spectral resolution. Due to its unique sensitivity, Fano resonance is widely used in physics and engineering fields such as optical sensors, optical switches and electromagnetically induced transparent resonators. In this paper, time-domain finite difference method is used to design a kind of Y-type gold periodic nanorods array, which has obvious Fano resonance phenomenon at 1.12-μm wavelength. When the array structural parameters change, the Fano resonance valley has a dramatic movement. The Y-type gold nanoarray structures have better sensing characteristics, and its figure of merit is 10.68. It shows the special nanoarray can be used for infrared sensors.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"46 1","pages":"219-222"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85570150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552207
Yunhai Ma, Siyang Wu, J. Tong, Xin Zhang, Jie-gang Peng, Xianping Liu
The steady and dynamic rheology and thixotropy of corn starch dispersions in pre-gelatinized starch solution were studied using AR500 rheometer. The effects of temperature, concentration and frequency on the viscosity were investigated, respectively, and the rheological mechanism of dispersions was illustrated clearly. The rheological tests indicate that corn starch dispersions experience two stages which are shear thinning and shear thickening. Compared with the temperature, the apparent viscosity is more sensitive to the concentration at low shear rate in steady rheological measurements. It also reveals that angular frequency has more significant effects on the critical oscillatory shear stress. The greater the concentration, the higher the thixotropic energy is, and showing extreme thixotropic behavior. These are mainly due to the internal continuous network structure of dispersions destroyed at low shear rate and starch granules aggregated into particle clusters at high shear rate.
{"title":"Rheological Properties of Corn Starch Dispersions in Pregelatinized Starch Solution","authors":"Yunhai Ma, Siyang Wu, J. Tong, Xin Zhang, Jie-gang Peng, Xianping Liu","doi":"10.1109/3M-NANO.2018.8552207","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552207","url":null,"abstract":"The steady and dynamic rheology and thixotropy of corn starch dispersions in pre-gelatinized starch solution were studied using AR500 rheometer. The effects of temperature, concentration and frequency on the viscosity were investigated, respectively, and the rheological mechanism of dispersions was illustrated clearly. The rheological tests indicate that corn starch dispersions experience two stages which are shear thinning and shear thickening. Compared with the temperature, the apparent viscosity is more sensitive to the concentration at low shear rate in steady rheological measurements. It also reveals that angular frequency has more significant effects on the critical oscillatory shear stress. The greater the concentration, the higher the thixotropic energy is, and showing extreme thixotropic behavior. These are mainly due to the internal continuous network structure of dispersions destroyed at low shear rate and starch granules aggregated into particle clusters at high shear rate.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"53 1","pages":"146-150"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80999023","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552174
Somayeh Soleimam-Amin, M. Koohi
Silicon doped heterofullerenes of C20, I-VIII, are compared and contrasted by density functional theory (DFT) calculations. All studied species are known as true minima by vibrational frequency analysis. Heterofullerenes included alternating heteroatoms in equatorial position are introduced as stable highly-doped heterofullerenes due to lack of weak silicon―silicon single bonds. No deformation was seen for eight isolated heterofullerenes and all are the isolated-pentagon fullerenic cage. The species of II with the most negative NICS, as well as the highest band gap and binding energy is distinguished as the most thermodynamically, kinetically and chemically stable heterofullerene. The calculated structure of C18Si2 (II) with C1 symmetry is included two silicon atoms in equatorial position. Heterofullerenes especially VIII with the most negative charges on carbon atoms and the most positive charges on silicon heteroatoms (3 to 5.6 times in relation to other species), display the points with different charges that make big charge transfer on the surface of them. That make it as an excellent volunteer for hydrogen storage. These computational results promote chemists to have more experimental verifications.
{"title":"Structure, Topology, Vibrational Frequency, Frontier Molecular Orbital Gaps, Stability, Charge, NICS, and Conductivity of Non-segregated Silicon Heterofullerenes: A DFT Approach","authors":"Somayeh Soleimam-Amin, M. Koohi","doi":"10.1109/3M-NANO.2018.8552174","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552174","url":null,"abstract":"Silicon doped heterofullerenes of C20, I-VIII, are compared and contrasted by density functional theory (DFT) calculations. All studied species are known as true minima by vibrational frequency analysis. Heterofullerenes included alternating heteroatoms in equatorial position are introduced as stable highly-doped heterofullerenes due to lack of weak silicon―silicon single bonds. No deformation was seen for eight isolated heterofullerenes and all are the isolated-pentagon fullerenic cage. The species of II with the most negative NICS, as well as the highest band gap and binding energy is distinguished as the most thermodynamically, kinetically and chemically stable heterofullerene. The calculated structure of C18Si2 (II) with C1 symmetry is included two silicon atoms in equatorial position. Heterofullerenes especially VIII with the most negative charges on carbon atoms and the most positive charges on silicon heteroatoms (3 to 5.6 times in relation to other species), display the points with different charges that make big charge transfer on the surface of them. That make it as an excellent volunteer for hydrogen storage. These computational results promote chemists to have more experimental verifications.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"34 1","pages":"51-54"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81660003","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552233
Dachang Zhu, Chunliang Zhang, Yanping Feng
Combining the Jacobi matrix derived by differential equivalent method with topological algorithm-SIMP, a novel structure synthesis method is proposed for the topological structure of 3-rotational DOF compliant mechanism. Referenced with the structural configuration of the parallel manipulator, Jacobi matrix is calculated derived for mapping the multi-inputs and multi-outputs of actuators and displacements, and then, it is used for the initial conditions during the optimal process. Combining the Jacobi matrix with SIMP approach, the topological model of spatial 3-rotational DOF compliant mechanism is built and solved. Numerical examples are used to further demonstrate the validity and efficacy of the proposed method.
{"title":"Topological Structure Synthesis of Three-Rotational-DOF Compliant Mechanisms","authors":"Dachang Zhu, Chunliang Zhang, Yanping Feng","doi":"10.1109/3M-NANO.2018.8552233","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552233","url":null,"abstract":"Combining the Jacobi matrix derived by differential equivalent method with topological algorithm-SIMP, a novel structure synthesis method is proposed for the topological structure of 3-rotational DOF compliant mechanism. Referenced with the structural configuration of the parallel manipulator, Jacobi matrix is calculated derived for mapping the multi-inputs and multi-outputs of actuators and displacements, and then, it is used for the initial conditions during the optimal process. Combining the Jacobi matrix with SIMP approach, the topological model of spatial 3-rotational DOF compliant mechanism is built and solved. Numerical examples are used to further demonstrate the validity and efficacy of the proposed method.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"304-307"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83107167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552183
J. Kimbrough, S. Chance, B. Whitaker, Z. Duncan, Kenneth Davis, Alandria Henderson, Zhigang Xiao, Qunying Yuan, F. Camino
Semiconducting carbon nanotubes (CNTs) were dispersed ultrasonically in the Nmethyl-2-pyrrolidone (NMP) solvent, and were aligned and patterned with the alternating electric field-directed dielectrophoresis (DEP) method. CNT transistors were fabricated with the DEP-patterned semiconducting CNTs. Clean room-based micro- and nanofabrication techniques such as UV lithography and lift-off process were used to fabricate the CNT devices. The patterned semiconducting carbon nanotubes and fabricated transistors were imaged using the scanning electron microscope (SEM), and the current-voltage (IV) curves were obtained. It was found that the gap between the opposite electrodes affected the patterning of CNTs in the DEP process; the CNT transistors had excellent current-voltage (IV) curves of p-channel filedeffect transistors with high ratios of on/off source-drain current values, and the semiconducting CNTs could achieve a higher yield in the device fabrication.
{"title":"Deposition and Alignment of Carbon Nanotubes with Dielectrophoresis for Fabrication of Carbon Nanotube Field-Effect Transistors","authors":"J. Kimbrough, S. Chance, B. Whitaker, Z. Duncan, Kenneth Davis, Alandria Henderson, Zhigang Xiao, Qunying Yuan, F. Camino","doi":"10.1109/3M-NANO.2018.8552183","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552183","url":null,"abstract":"Semiconducting carbon nanotubes (CNTs) were dispersed ultrasonically in the Nmethyl-2-pyrrolidone (NMP) solvent, and were aligned and patterned with the alternating electric field-directed dielectrophoresis (DEP) method. CNT transistors were fabricated with the DEP-patterned semiconducting CNTs. Clean room-based micro- and nanofabrication techniques such as UV lithography and lift-off process were used to fabricate the CNT devices. The patterned semiconducting carbon nanotubes and fabricated transistors were imaged using the scanning electron microscope (SEM), and the current-voltage (IV) curves were obtained. It was found that the gap between the opposite electrodes affected the patterning of CNTs in the DEP process; the CNT transistors had excellent current-voltage (IV) curves of p-channel filedeffect transistors with high ratios of on/off source-drain current values, and the semiconducting CNTs could achieve a higher yield in the device fabrication.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"7 1","pages":"308-311"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74094737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552247
Yang Jiao, Jiasheng Li, Pinkuan Liu
Four-scanning-heads error separation method under optimal arrangement has proven useful for measuring the radial error motion of axis of rotation. This technique is based upon the fact that angles read by scanning heads are mainly affected by both the graduation error of the angle encoder’s scale and the spindle radial error motion. This paper presents a further validation of this method on a high-accuracy air-bearing rotary stage equipped with an angle encoder with six scanning heads. Experiments are performed to measure the radial error motion by three different four-scanning-heads arrangement schemes. The results show a nanometer-level repeatability of the measured error motion. Moreover, the error motion values obtained by these three arrangement schemes agree very well, which further confirm the effectiveness of the method. This technique is well suited for error motion measurement of rotary tables with angle encoder as the angle measuring device, since it needs no additional artifact compared with the conventional methods.
{"title":"Radial Error Motion Measurements at Nanometer-level Precision Using Angle Encoder with Different Four-scanning-heads Arrangements","authors":"Yang Jiao, Jiasheng Li, Pinkuan Liu","doi":"10.1109/3M-NANO.2018.8552247","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552247","url":null,"abstract":"Four-scanning-heads error separation method under optimal arrangement has proven useful for measuring the radial error motion of axis of rotation. This technique is based upon the fact that angles read by scanning heads are mainly affected by both the graduation error of the angle encoder’s scale and the spindle radial error motion. This paper presents a further validation of this method on a high-accuracy air-bearing rotary stage equipped with an angle encoder with six scanning heads. Experiments are performed to measure the radial error motion by three different four-scanning-heads arrangement schemes. The results show a nanometer-level repeatability of the measured error motion. Moreover, the error motion values obtained by these three arrangement schemes agree very well, which further confirm the effectiveness of the method. This technique is well suited for error motion measurement of rotary tables with angle encoder as the angle measuring device, since it needs no additional artifact compared with the conventional methods.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"61 1","pages":"105-109"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85123189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552208
Xiaomeng Hu, Lin Wang, Qiaomei Guo, J. Lou, Lin Huang, Ru Zhang, Kun Qian
As the third generation of molecular marker, single nucleotide polymorphism (SNP) has considerable application value in many fields. It requires high-throughput, simple and precise methods for SNP detection. We demonstrated a new nucleic acids detection approach using nanoparticles as co-matrix assisted with laser desorption/ionization mass spectrometry (LDI MS). Owing to the condensation of metal oxide nanoparticles, we achieved uniform crystallization of organic matrix. Consequently, the detection sensitivity for oligonucleotides could be significantly improved by 8 folds. Our work represented a novel approach for enhancement of SNP detection by LDI MS.
{"title":"Nanoparticles as Co-matrix for Sensitive Detection of Nucleic Acids by Mass Spectrometry","authors":"Xiaomeng Hu, Lin Wang, Qiaomei Guo, J. Lou, Lin Huang, Ru Zhang, Kun Qian","doi":"10.1109/3M-NANO.2018.8552208","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552208","url":null,"abstract":"As the third generation of molecular marker, single nucleotide polymorphism (SNP) has considerable application value in many fields. It requires high-throughput, simple and precise methods for SNP detection. We demonstrated a new nucleic acids detection approach using nanoparticles as co-matrix assisted with laser desorption/ionization mass spectrometry (LDI MS). Owing to the condensation of metal oxide nanoparticles, we achieved uniform crystallization of organic matrix. Consequently, the detection sensitivity for oligonucleotides could be significantly improved by 8 folds. Our work represented a novel approach for enhancement of SNP detection by LDI MS.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"414 1","pages":"336-340"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80822633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The digital micromirror device (DMD) which is one kind of Micro-Electro-Mechanical System has been widely adapted for use in lighting projection systems, and some new imaging systems such as high-dynamic range imaging, aperture-coded spectral imaging, or medical imaging. The micromirrors on the DMD surface are non-continuous distribution and capable of tilt relative to individual rotation axis, which is different from the plane mirror. Therefore, when the DMD is applied in a convergence imaging path, there is an optical path difference (OPD) between the off-axis chief ray and the on-axis chief ray, and moreover severe non-symmetric imaging on the focal plane. Based on the geometrical optics and aberration theory, this paper proposes a calculation formula that gives the OPD as a function of the image height, the incident angle, the DMD pixel size and the DMD tilt angle in the convergent imaging path. This formula can give the OPD of the system when the optical axis is vertical to the surface of the DMD in an ideal state, which has great significance to the design and adjustment of optical path using DMD devices.
{"title":"Image Analysis with the DMD in Convergent Path","authors":"Yong-qiang Sun, Yuan Hu, Yuegang Fu, Yueqi Wang, Qi Wang, Yu Zhao","doi":"10.1109/3M-NANO.2018.8552188","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552188","url":null,"abstract":"The digital micromirror device (DMD) which is one kind of Micro-Electro-Mechanical System has been widely adapted for use in lighting projection systems, and some new imaging systems such as high-dynamic range imaging, aperture-coded spectral imaging, or medical imaging. The micromirrors on the DMD surface are non-continuous distribution and capable of tilt relative to individual rotation axis, which is different from the plane mirror. Therefore, when the DMD is applied in a convergence imaging path, there is an optical path difference (OPD) between the off-axis chief ray and the on-axis chief ray, and moreover severe non-symmetric imaging on the focal plane. Based on the geometrical optics and aberration theory, this paper proposes a calculation formula that gives the OPD as a function of the image height, the incident angle, the DMD pixel size and the DMD tilt angle in the convergent imaging path. This formula can give the OPD of the system when the optical axis is vertical to the surface of the DMD in an ideal state, which has great significance to the design and adjustment of optical path using DMD devices.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"5 1","pages":"386-389"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90803397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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