{"title":"Linearity Measurements of Intrinsically Switchable BST FBAR Filters","authors":"M. Koohi, Suhyun Nam, A. Mortazawi","doi":"10.23919/EUMC.2018.8541805","DOIUrl":null,"url":null,"abstract":"The linearity of intrinsically switchable thin film bulk acoustic wave resonator (FBAR) filters based on ferroelectric barium strontium titanate (BST) is investigated. A 2.5 stage ladder type BST FBAR filter is designed and fabricated with an insertion loss of 4.3 dB and a fractional bandwidth of 2.5% at the center frequency of 2.2 GHz. Third-order intercept point $(\\mathbf{IP}_{\\mathbf{3}})$ measurements are conducted to characterize the linearity of the filter. The measured $\\mathbf{IIP}_{3}$ value for the filter is 47 dBm.","PeriodicalId":6472,"journal":{"name":"2018 48th European Microwave Conference (EuMC)","volume":"23 1","pages":"830-832"},"PeriodicalIF":0.0000,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 48th European Microwave Conference (EuMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/EUMC.2018.8541805","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The linearity of intrinsically switchable thin film bulk acoustic wave resonator (FBAR) filters based on ferroelectric barium strontium titanate (BST) is investigated. A 2.5 stage ladder type BST FBAR filter is designed and fabricated with an insertion loss of 4.3 dB and a fractional bandwidth of 2.5% at the center frequency of 2.2 GHz. Third-order intercept point $(\mathbf{IP}_{\mathbf{3}})$ measurements are conducted to characterize the linearity of the filter. The measured $\mathbf{IIP}_{3}$ value for the filter is 47 dBm.
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